SEM Calibration Standards

Agar Fine Copper Mesh on Folding Grids.

These selected fine mesh grids are suitable for scanning electron microscopes and the low magnification range of transmission electron microscopes. The fine mesh is held within a folding grid. For SEM the grids should be mounted on stubs.
 

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High Resolution Test Specimen - Gold on Carbon
 

Ultra High Resolution Test Specimen - Gold on Carbon
 

Particle size range <3nm - 50nm. Suitable for high resolution SEM. Magnification of x50,000 and above
 

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Tin on Carbon Resolution Test Specimen

An alternative test specimen for medium resolution. Thin spheres of 10-100nm are dispersed on a carbon substrate. Ideal for stigmatism correction. It is also recommended for use in SEM employed in the semi-conductor industry where the usual gold on carbon cannot be used.

SEM Standard
Aluminum - Tungsten Dendrites

This test specimen is intended for use in evaluating the resolution and performance of SEM. The denritic structure formed on the surface has various spacing that can be used to evaluate the resolution at both low and high magnifications and has a high secondary electron emission. It is non magnetic, vacuum clean, has no adverse reaction (melting) to an electron beam and no surface preparation or coating is necessary. The standard is supplied unmounted.

Critical Dimension (CD) Calibration Test Specimen
 

Critical Dimension calibration test specimen of 10-5-2-1 um is very useful for magnification calibration. The CD calibration test specimen is of particular interest to microscopists and test engineers using high performance SEM’s for critical measurement

Silicone standard size: 4.8 x 4.8 mm has a series of chess patterns around its edges with a side length of 480um. These can be used for optimizing imaging parameters and distortion checking.

The central region of the standard contains a series of four line patterns each one clearly identified with its pitch size. Each pattern is made up of 5 bars and spaces of equal width. Pitches for the individual patterns range in size from 1.0um - 10.0um Each standard is identified by a unique serial number. Specimen supplied unmounted.
 

Waffle SEM Magnification Standard

 
A specially prepared cross line grating replica is mounted on a SEM specimen stubs. Special evaporation technique brings out the contrast necessary to observe easily this high-density grating and thus offer the high resolution SEM investigator a method for accurate magnification calibration.

Celestial Spheres

Polystyrene spheres of  9.89um mean size. They are prepared in  gravity-free conditions, where an exceptionally uniform sphere is produced. They can be dispersed over any specimen to be examined. Spheres are available in suspension or dispersed on a silicone disc - (uncoated). The disc has to be mounted on a specimen stub.

Duplex Specimen
(Reference Sample for BSE Detection System)
 

Very sensitive test is by means of an alloy with two major copper/zinc phases separated  by an atomic number difference of 0.1.  The light phase illustrated in the micrograph has a mean  atomic number of 29.47and the dark phase a mean atomic number of 29.37.
 

Reference Specimens for Back-Scattered Electron Detection Systems

When equipped with a back scattered electron detector, an electron microscope has the capability to produce images in which the contrast is controlled by differences in atomic number across the specimen. Three reference specimens are now available that are suitable for testing the atomic number contrast performance. Each of the reference specimens consists of two high purity elements that have an atomic number difference of 1. They are in the form of a wire of the low Z element embedded in a matrix of the high Z element. The specimens are available as a single mount in 5 mm diameter block.

Chessy Test Specimen

This specimen can be used for SEM magnification calibration in the range x20 to x50,000 and also useful for orthogonality and distortion checking. The specimen is fabricated by electron beam lithography techniques producing alternate squares of gold and silicone in a chessy board pattern. The largest pattern has a side length of 1 mm which is further divided into 10 x 100um squares. The gold squares are further divided into 10 x 10um and 10x1um squares.

Polystyrene Latex Particles
Magnification Calibration.

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Low Voltage Resolution Tin on Carbon

Tin on carbon specimen with larger spheres for ease of   use in low kV imaging, where gold on carbon may not be appropriate. The spherical of the balls makes it ideal for astigmatism assessment.

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Geller Reference Standard MRS-4

This is similar in design and construction to the MRS-3. For high magnification calibration, two additional nested squares with pitches of 1um and 0.5um extend the useful calibration range to x2000,000. Two 6mm long scales in the X and Y directions which are subdivided at 1um intervals allow calibration over a wide range of magnifications using the same scale.


Ordering information for MRS-4:

When ordering make reference for universal holder or optical holder for mounted specimen.
 

TEM Calibration Standards  |  Calibration Specimens for SEM
Single Hole Discs Apertures  |  Ultra-Thin Gold Film Apertures
Electron Microscope Filaments  |  P-47 Scintillator  |  YAG Single Crystal Scintillator
YAP Single Crystal Scintillator