This is a simple to use, basic sputter coater for gold deposition of
SEM specimens. The coater is fitted with a cool magnetron type
sputtering head with 57mm diameter gold target, which gives
efficient sputtering with minimal heating. The sputter current can be
set independently of the gas pressure. The gas pressure is
controlled by a manual leak valve. The vacuum status and sputter
current are displayed on the panel meter. Coating time is set by a
timer with a digital readout and stored in the memory.
Chamber size: 120 x 120 mm, the adjustable height specimen table
will accept up to 12 pin type stubs or can be used as a platform for
other types of specimen stubs.
A vacuum feed through is provided for the
optional
Film
Thickness
Monitor (#7348)
|
Catalog # |
Description |
Qty |
|
7340 |
Agar Manual sputter coater |
Each |
|
7366 |
Pumping system |
Each |
|
Please use the catalog number
and description when ordering. |
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A 57mm Diameter, 0.1mm thick Gold target is fitted as standard.
Au/Pd, Pt, Pt/Pd targets are available as an option.
Holds 12 SEM pin type specimen stubs.
This is a more advanced sputter coater where the complete
sequence of flush, leak, coat and vent is automatically controlled.
The solenoid operated leak valve allows the gas pressure to return
automatically to pre-set conditions. The coater can also be operated
in the manual mode if required. The sputter current is set by a
digital programmer and is independent of the gas pressure.
Sputtering current up to 40mA allows a range of different target
materials e.g. AU/Pd, to be efficiently sputtered by the magnetron
head. Coating time can be set, stored and displayed by the digital
timer. Further automation can be achieved with the addition of the a
Terminating Film
Thickness Monitor. With this
fitted, the desired thickness can be entered and the sputtering
process is automatically terminated once this thickness has been
obtained.
Chamber size: 120 mm x 120 mm.
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Canemco offers one of the widest ranges of
spare
Targets for Sputter Coaters available in the industry. Targets are available
for a number of well known makes of sputter coaters
This compact pumping system is designed for use with the Agar
Coating Units. The 2m3/hr two stage rotary pump is
mounted on an anti vibration platform and is equipped with an
oil-mist filter. The metal bellows with KF fittings provide a short
wide bore connection for maximum pumping efficiency. Pump down time
to 0.1 mbar is 30 seconds.
The dual pumping system includes an additional bellows, KF fittings
and a changeover valve which enables the combination of the Agar
sputter coater and Agar carbon coater to be operated from a single
pump.
An upgrade kit is also available to fit to existing pumps.
|
Catalog # |
Description |
Qty |
|
7366 |
Pumping system for Agar coaters |
Each |
|
7736 |
Dual pumping system for Agar coaters |
Each |
|
7379 |
Dual pumping system upgrade kit |
Each |
|
Please use the catalog number
and description when ordering. |
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The SEM carbon coater is a dedicated unit for
routine coating of SEM and microprobe samples where a conductive low
atomic number coating is required. The stand alone system eliminates
the possible cross contamination which can occur when using
multipurpose coaters.
The dual shaped carbon rod source with unique current feedback
control gives highly reproducible deposition rates using the same
current settings. The source produces a high rate of evaporation
with minimal specimen heating. Coating can be carried out using
continuous or pulsed modes. Vacuum status or source current are
displayed on a meter with manual switch-over. Equipped with a port
to accept the optional
film thickness monitor. (Catalog # 7348)
Chamber size: 120 mm x 120 mm.
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A microprocessor based film thickness monitor for
use with the Agar Coating Units. The system uses a 6MHz quartz
crystal oscillator mounted in a crystal holder. The control unit has
a digital readout which displays coating thickness directly in
nanometers with a resolution of 0.1nm. A dual memory is provided for
storage of two target densities. A tooling factor can also be
entered to compensate for differences in specimen and crystal
position.
An upgrade kit allows the single control unit to be shared between
two Agar coaters. Alternative vacuum feed-through are available to
allow the thickness monitor to be fitted to other coating units.
|
Catalog # |
Description |
Qty |
|
7348 |
Agar film thickness monitor |
Each |
|
7386 |
Film thickness monitor upgrade kit |
Each |
|
7732 |
Quartz crystals, 6MHz. |
10/pkg |
|
Please use the catalog number
and description when ordering. |
This unit is designed for use with the
Agar
automatic
sputter coater. Desired thickness
can be entered using the scroll keys. The control unit can then be
used to terminate the sputtering process once the pre-set thickness
has been reached.
|
Catalog # |
Description |
Qty |
|
7349 |
Agar terminating film thickness monitor |
Each |
|
Please use the catalog number
and description when ordering. |
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Shaped carbon rods made from spectroscopically pure carbon, are
available in 3.1mm and 6.3 mm diameters.
The advantages of using these rods are:
-
Reproducible carbon film thickness, due to
the
standard tip length.
-
Less evaporation current is needed, thereby
reducing the possibility of specimen damage from radiant heat.
|
Catalog # |
Description |
Qty |
|
613 |
Shaped carbon rods, 3.1 mm dia, 50mm
long, |
10/pkg |
|
614 |
Shaped carbon rods, 6.1 mm dia, 50mm
long, |
10/pkg |
|
Please use the catalog number
and description when ordering. |
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Carbon fibre is an economically priced consumable for the carbon coater
and sputter coater with a carbon fiber attachment. This fibre provides
a
reproducible, uniform, deposition. The carbon braid is thicker, high density, 2.6mm diameter for carbon
deposition with evaporators.
|
Catalog # |
Description |
Qty |
|
678 |
Carbon fibre 1meter/pkg |
Pkg |
|
678-1 |
Carbon fiber, 2.6mm dia.
1 meter/pkg |
Pkg |
|
Please use the catalog number
and description when ordering. |
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Replacement spare parts
including glass chambers,
gaskets, valves and vacuum
gauges can be supplied for
current and older models
of Agar, Polaron/Biorad/VG
and Edwards coating units.
Please specify the make and model number
of the coating unit.
Contact customer service at
canliv@canemco.com
or
1-877-633-0550
Other spares include replacement quartz crystals
for use with the Polaron film thickness monitor.
|
Catalog # |
Description |
Qty |
|
7425 |
Quartz crystals, for Polaron FTM |
3/pkg |
|
Please use the catalog number
and description when ordering. |
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| 
